LASER PROCESSING DEVICE

摘要

A laser processing device including: a laser oscillator; a processing table; a transmission optical system for transmitting laser light emitted from the laser oscillator to the processing table; a processing head for condensing and radiating the laser light transmitted via the transmission optical system to an object to be processed; a moving mechanism for changing a relative position between the object to be processed and the laser light to be radiated to the object to be processed; and a variable curvature spherical mirror. The transmission optical system includes a reflective beam expander mechanism for collimating and magnifying the laser light from the laser oscillator. The reflective beam expander mechanism includes a spherical mirror and a concave mirror having different curvatures in two orthogonal axes.

主权项

1. A laser processing device, comprising:
a laser oscillator for emitting laser light; a processing table for placing an object to be processed; a transmission optical system for transmitting the laser light emitted from the laser oscillator to the processing table; a processing head for condensing and radiating the laser light transmitted via the transmission optical system to the object to be processed; and moving means for changing a relative position between the object to be processed and the laser light to be radiated to the object to be processed, wherein the transmission optical system comprises:
a reflective beam expander mechanism for collimating and magnifying the laser light from the laser oscillator; anda variable curvature spherical mirror, wherein the reflective beam expander mechanism comprises a spherical mirror and a mirror having different curvatures in two orthogonal axes, and wherein the variable curvature spherical mirror is placed between the spherical mirror and the mirror having different curvatures in two orthogonal axes.