Differential Imaging with Pattern Recognition for Process Automation of Cross Sectioning Applications

摘要

A method for using differential imaging for applications involving TEM samples by allowing operators to take multiple images during a procedure involving a focused ion beam procedure and overlaying the multiple images to create a differential image that clearly shows the differences between milling steps. The methods also involve generating real-time images of the area being milled and using the overlays of the differential images to show small changes in each image, and thus highlight the ion beam milling location. The methods also involve automating the process of creating differential images and using them to automatically mill subsequent slices.

主权项

1. A method for performing endpointing on a sample with a charged particle beam system comprising:
loading a sample into a charged particle beam system, the charged particle beam system including an ion beam and electron microscope; milling, using the ion beam, the sample to expose a first surface of the sample; forming, using the electron microscope, a first image of the first surface of the sample; milling, using the ion beam, the first surface of the sample to expose a second surface of the sample; forming, using the electron microscope, a second image of the second surface of the sample; forming a third image by overlaying the second image over the first image, the third image being a differential image formed by subtracting the second image from the first image, the third image showing the difference made from the ion beam milling to create the second surface.