PLACEMENT TABLE AND PLASMA PROCESSING APPARATUS

摘要

The purpose of the present invention is to enhance a resistance against RF noises. According to the present invention, a placement comprises: a base; an electrostatic chuck disposed on an upper part of the base having a placement surface wherein an object to process is disposed; a plurality of heat generating members disposed on opposite side to the placement surface of the electrostatic chuck; a power supply to generate an electric current to generate heat of each of a plurality of heat generating members; a plurality of cables to conduct the electric current between each of the plurality of heat generating members and the power supply; and a filter disposed in each of a plurality of cables to remove high frequency components having higher frequency than the electric current.