Device and method for manufacturing nanostructures consisting of carbon

摘要

The invention relates to a device for manufacturing nanostructures consisting of carbon, such as monolayers, multilayer sheet structures, tubes, or fibers having a gas inlet element (2) having a housing cavity (5) enclosed by housing walls (3, 3′, 3″), into which a gas feed line (6) opens, through which a gaseous, in particular carbonaceous starting material can be fed into the housing cavity (5), having a plasma generator, which has components (8, 9, 10) arranged at least partially in the housing cavity (5), which has at least one plasma electrode (9) to which electrical voltage can be applied, to apply energy to the gaseous starting material by igniting a plasma and thus convert it into a gaseous intermediate product, and having a gas outlet surface (4) having a plurality of gas outlet openings (7), through which the gaseous intermediate product can exit out of the housing cavity (5). A gas heating unit (11) is provided for assisting the conversion, which is arranged downstream of the components (8, 9, 10).

主权项

1. A device for manufacturing nanostructures consisting of carbon, such as monolayers, multilayer sheet structures, tubes, or fibers, having a gas inlet element (2) having a housing cavity (5) enclosed by housing walls (3, 3′, 3″), into which a gas feed line (6) opens, through which a gaseous, in particular carbonaceous starting material can be fed into the housing cavity (5), having a plasma generator, which has components (8, 9, 10) arranged at least partially in the housing cavity (5), which has at least one plasma electrode (9), to which electrical voltage can be applied, to apply energy to the gaseous starting material by igniting a plasma and thus convert it into a gaseous intermediate product, and having a gas outlet surface (4) having a plurality of gas outlet openings (7), through which the gaseous intermediate product can exit out of the housing cavity (5), characterized by a gas heating unit (11) for assisting the conversion, which is arranged downstream of the components (8, 9, 10).