ESD PROTECTION DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

An ESD protection device is manufactured such that its ESD characteristics are easily adjusted and stabilized. The ESD protection device includes an insulating substrate, a cavity provided in the insulating substrate, at least one pair of discharge electrodes each including a portion exposed in the cavity, the exposed portions being arranged to face each other, and external electrodes provided on a surface of the insulating substrate and connected to the at least one pair of discharge electrodes. A particulate supporting electrode material having conductivity is dispersed between the exposed portions of the at least one pair of discharge electrodes in the cavity

主权项

1. A method for manufacturing an ESD protection device comprising:
a first step of forming a supporting electrode portion by disposing conductive material powder in a single layer such that only a single particle of the conductive material powder is provided in a thickness direction, the conductive material powder being disposed on a principal surface of a first insulating layer; a second step of forming at least one pair of discharge electrodes on the principal surface of the first insulating layer so that at least one portion of the supporting electrode portion is exposed between the at least one pair of discharge electrodes; a third step of forming a second insulating layer on the principal surface of the first insulating layer so that the second insulating layer coats the at least one pair of discharge electrodes and covers an exposed region at which the at least one portion of the supporting electrode portion is exposed between the at least one pair of discharge electrodes, the second insulating layer being separated from the exposed region; and a fourth step of forming external electrodes on a surface of a laminated body obtained through the third step such that the external electrodes are connected to the at least one pair of discharge electrodes; wherein a cavity surrounded by the second insulating layer, the as least one pair of discharge electrodes, and the exposed region is formed.