发明名称 |
Holding Device for an Optical Element in an Objective |
摘要 |
A holding device for an optical element in an objective has a mount that is connected to the objective, on the one hand, and at least indirectly to the optical element, on the other hand. Arranged between the mount and the optical element is a reinforcing element whose coefficient of thermal expansion corresponds substantially to the coefficient of thermal expansion of the optical element. |
申请公布号 |
US2015138520(A1) |
申请公布日期 |
2015.05.21 |
申请号 |
US201414503697 |
申请日期 |
2014.10.01 |
申请人 |
ASML Netherlands B. V. ;Carl Zeiss SMT GMBH |
发明人 |
Gellrich Bernhard;Wurmbrand Andreas;Kugler Jens;Schoeppach Armin;Zengerling Christian;Bruynooghe Stephane |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Veldhoven NL |