发明名称 |
PRESSURE SENSOR, PRESSURE SENSING SYSTEM, AND PRESSURE SENSOR MANUFACTURING METHOD |
摘要 |
<p>To provide a pressure sensor, and the like, capable of accurately measuring pressure regardless of the ambient temperature, in a pressure sensor (1) according to the present invention, the change in the resistance value of a resistive layer (16) in response to a change in the ambient temperature when the resistive layer (16) is subjected to stress as a result of the change in the ambient temperature and a compensation value for reducing the change in the resistance value are determined, and the resistance value of the resistive layer (16) is set to a resistance value corresponding to the same temperature coefficient as that of the compensation value on the basis of the correspondence between the temperature coefficient of the resistive layer (16) and the resistance value.</p> |
申请公布号 |
WO2015072189(A1) |
申请公布日期 |
2015.05.21 |
申请号 |
WO2014JP71066 |
申请日期 |
2014.08.08 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
FUKUNAGA, NAOKI;NATSUAKI, KAZUHIRO;TAKEDA, YOSHIROH;AOYAMA, KOHJI |
分类号 |
G01L9/00;H01L29/84 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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