发明名称 半導体装置の作製方法
摘要 <p>The present invention provides a semiconductor device which is not easily damaged by external local pressure. The present invention further provides a method for manufacturing a highly-reliable semiconductor device, which is not destructed by external local pressure, with a high yield. A structure body, in which high-strength fiber of an organic compound or an inorganic compound is impregnated with an organic resin, is provided over an element layer having a semiconductor element formed using a non-single crystal semiconductor layer, and heating and pressure bonding are performed, whereby a semiconductor device is manufactured, to which the element layer and the structure body in which the high-strength fiber of an organic compound or an inorganic compound is impregnated with the organic resin are firmly fixed together.</p>
申请公布号 JP5721777(B2) 申请公布日期 2015.05.20
申请号 JP20130120773 申请日期 2013.06.07
申请人 株式会社半導体エネルギー研究所 发明人 杉山 栄二;道前 芳隆;大谷 久;鶴目 卓也
分类号 H01L21/02;G06K17/00;H01L27/12 主分类号 H01L21/02
代理机构 代理人
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