GERMANIUM-TELLURIUM SINGLE PRECURSORS, PREPARATION METHOD THEREOF AND PROCESS FOR THE FORMATION OF THIN FILMS USING THE SAME

摘要

The present invention relates to a germanium tellurium single precursor denoted by chemical formula 1, which has improved thermal stability and volatility and does not need a process of adding tellurium when manufacturing thin films, thereby forming thin films including quality germanium tellurium where R1 and R2 are independently linear type or branched type alkyl groups whose carbon numbers are 1 to 10 in chemical formula 1.