摘要 |
The present invention relates to a manufacturing method of glass laminated body comprising a support substrate, a support substrate having an inorganic layer arranged on the support substrate, and a glass substrate laminated on the inorganic layer to be possibly exfoliated. Also, the manufacturing method of glass laminated body according to the present invention comprises a lamination process for laminating the glass substrate on the inorganic layer, a heat treatment process for applying the heat treatment after the lamination process, and the inorganic layer having at least one kind selected from the group consisting of carborundum, carbonized silicon oxide, silicon nitride, and silicon oxynitride. The heat treatment process satisfies the following conditions of (a) to (d) which includes (a) temperature raising rate : at most 300°C/min; (b) heating temperature : 150 to 600°C; (c) maintenance time : at least 0.5min; (d) atmosphere : atmosphere pressure state or atmospheric environment of decompression state or inert gas atmosphere or vacuum atmosphere. |