| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser ultrasonic inspection technique for performing nondestructive inspection of an inspection object whose surface shape is complicated at a high speed with high precision. <P>SOLUTION: A laser ultrasonic inspection device 10 includes a transmission laser head 21 which irradiates the inspection object K with first laser light R1 to excite an ultrasonic wave; a reception laser head 22 which performs irradiation with second laser light R2 to detect an ultrasonic wave propagated in the inspection object K; a signal processing part which images a defect included in the inspection object K based upon the ultrasonic wave detected by the reception laser head 22; and an angle adjustment part 13 which adjusts angles of incidence of the first laser light R1 and second laser light R2 on the surface of the inspection object K. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
