| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an electromechanical conversion membrane which makes stable membrane lamination possible even in repeated heat treatment and can shorten a manufacturing process, as well as an electromechanical conversion element, a liquid droplet discharge head and a liquid droplet discharge device. <P>SOLUTION: The manufacturing method of an electromechanical conversion membrane 83 in a liquid discharge head component having, on a substrate or an underlying membrane, an electromechanical conversion element composed of a first electrode, an electromechanical conversion membrane 83 and a second electrode in order, includes a process of forming a surface modification film 80 consisting of a compound having at least a photocatalytic function of titanium oxide, etc. and a process in which light is selectively radiated on the surface modification film 80 to heighten the hydrophilic property of a light radiated portion and control is exerted so that a difference in the angle of contact with water between the light radiated portion and non-light radiated portions exceeds 60°. Thus, a portion 81 made hydrophilic is patterned directly, or via a first electrode provided in the hydrophilic portion 81, by an ink jet method, in which way an electromechanical conversion element is formed. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
