METHOD FOR SUPPLYING DEPOSITION MATERIAL, METHOD FOR PRODUCING SUBSTRATE, CONTROL DEVICE, AND DEPOSITION DEVICE

摘要

Provided is a method for supplying a deposition material including a heating step of heating and evaporating a deposition material accommodated in a material accommodating section in which the deposition material is accommodated, a supply step of supplying the deposition material into the material accommodating section by feeding and melting a deposition material in a solid phase toward the melted deposition material in the material accommodating section, and a melted state detection step of detecting a melted state of the deposition material in the solid phase after supply in the supply step.