发明名称 ウェハ構造の電気的結合
摘要 <p>A method for electrically coupling a first wafer with a second wafer is provided. The method includes bonding the first wafer with the second wafer using a bonding material. The method further includes forming an opening in the first wafer in a scribe area of the second wafer to expose a surface of a conductive structure of the second wafer. The method further includes forming a conductive layer overlying the first wafer and the opening in the first wafer such that the conductive layer forms an electrical contact with the conductive structure of the second wafer thereby electrically coupling the first wafer with the second wafer.</p>
申请公布号 JP5721742(B2) 申请公布日期 2015.05.20
申请号 JP20120544551 申请日期 2010.11.22
申请人 发明人
分类号 H01L23/02;B81B7/02;B81C3/00;H01L21/301 主分类号 H01L23/02
代理机构 代理人
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