| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high-frequency transmission material which has direct-current electrical conductivity for reducing fluctuations in plasma potential, has capacitive properties that enable the material to transmit high-frequency power necessary for plasma excitation, has no fear of causing contamination of a sample with a metal and has resistance to corrosion by plasmas. <P>SOLUTION: The high-frequency transmission material is made of a composite material prepared by dispersing a fibrous carbon such as a carbon nanotube in yttrium oxide. The high-frequency transmission material comprises≥1-≤10 vol.% fibrous carbon based on the total volume of the fibrous carbon and yttrium oxide, shows a volume resistivity of≤30Ωcm under a direct voltage and has a negative (-) impedance angle at a high-frequency range of≥10 MHz. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
