发明名称 面取り装置および面取り方法
摘要 <p>A chamfering apparatus of the present invention comprises: a stage that suctionally attaches to a sheet-like body; and a grindstone that grinds the peripheral edge of the sheet-like body suctionally attached to a suctional attachment surface of the stage, wherein the suctional attachment surface includes three or more suction regions each having at least one opening, and the chamfering apparatus further comprises a decompression device that performs suction by commencing decompression within the openings in a sequential order for each suction region from a suction region located near the center of the suctional attachment surface to a suction region located far from the center of the suctional attachment surface.</p>
申请公布号 JP5720696(B2) 申请公布日期 2015.05.20
申请号 JP20120541774 申请日期 2011.09.14
申请人 发明人
分类号 B24B41/06;B24B9/00 主分类号 B24B41/06
代理机构 代理人
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