发明名称 GLASS LAMINATED BODY AND MANUFACTURING METHOD OF ELECTRONIC DEVICE
摘要 The present invention relates to a manufacturing method of glass laminated body comprising a support substrate, a support substrate having an inorganic layer arranged on the support substrate, and a glass substrate laminated on the inorganic layer to be possibly exfoliated wherein the inorganic layer is an opposite surface side to the support substrate side, and has SiC1-xOx(x=0. 10 to 0.90) and/or SiN1-yOy(y=0. 10 to 0. 90) as a composition for the inorganic layer surface, and also has 0.20 to 1.00 nm of surface roughness (Ra) of the inorganic layer surface.
申请公布号 KR20150054693(A) 申请公布日期 2015.05.20
申请号 KR20140155996 申请日期 2014.11.11
申请人 ASAHI GLASS COMPANY LTD. 发明人 NIU GUANGYAO;AKITA YOSUKE
分类号 B32B17/06;B32B7/06;H01L31/042;H01L51/50 主分类号 B32B17/06
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