SHOWER HEAD ASSEMBLY AND PLASMA PROCESSING APPARATUS

摘要

An objective of the present invention is to provide a shower head assembly having good thermal responsiveness and thermal uniformity. According to the present invention, the shower head assembly supplies gas and comprises an electrode plate and a ceramic base body to support the electrode plate. The ceramic base body comprises: a first and a second gas dispersion space formed on a middle or a periphery of the base body; a first and a second heater electrode layer formed above the first and the second gas dispersion space; a first and a second refrigerant passage formed above the first and the second gas dispersion space and above or below the first and the second heater electrode layer; and a first and a second gas supply passage to supply gas through the first and the second gas dispersion space. The shower head assembly does not have contact surfaces inside the base body.