LIFT OFF APPRATUS USING LASER AND LIFT OFF METHOD USING THEREOF

摘要

According to an embodiment of the present invention, a selective separation device using a laser to selectively separate an LED cell from a substrate using a laser comprises: a laser generator to generate a laser; a support to support a substrate formed with an LED cell; and a separation member installed under the substrate to separate the LED cell from the substrate. The separation member includes a separation tip to come in contact with the LED cell and a vibration part to vibrate the separation tip.