| 摘要 |
<p>Provided is a conveyance mechanism for an article being processed, which comprises: a conveyance member which is provided with a cylindrical slide shaft on the lower part thereof and carries the article being processed; and a support member comprising a plurality of rollers, which is provided with a U-shaped groove for guiding the conveyance member. At least the contact part of the slide shaft or the rollers consists of a bulk body comprising silicon, aluminium, oxygen and nitrogen, and at least the contact part of the other of the slide shaft or the rollers is made of stainless steel.</p> |
