MANUFACTURING APPARATUS FOR DEPOSITING A MATERIAL AND A SOCKET FOR USE THEREIN

摘要

A manufacturing apparatus deposits material on a carrier body. The manufacturing apparatus includes a housing defining a chamber. The housing defines an inlet for introducing a deposition composition, which comprises the material or a precursor thereof, into the chamber. The housing also defines an outlet through the housing for exhausting the deposition composition from the chamber. An electrode is disposed through the housing with the electrode at least partially disposed within the chamber. A socket has an exterior surface and is connected to the electrode within the chamber for receiving the carrier body. A release coating is disposed on the exterior surface of the socket for promoting separation of the socket from the carrier body, and the material deposited thereon, to harvest the carrier body.