| 摘要 |
The present invention relates to a blanking device for multi charged particle beam, and a multi charged particle beam writing method. A blanking device for multi-charged particle beams of the present invention comprises a plurality of shift registers arranged in two dimensions, and a plurality of data transmitters each configured to be arranged, where each of first shift register groups is aligned in the same row or column, in the plurality of shift registers arranged in two dimensions, the plurality of data transmitters each arranged for each of second shift register groups each obtained by grouping shift registers of one of the first shift register groups into one or more groups, wherein each of the second shift register groups is further grouped into third shift register groups each having shift registers serially connected, as plurality of subgroups, and each of the plurality of data transmitters is connected to each one shift register which is serially connected to every third shift register group so as to connect in parallel with every subgroups in each corresponding group. |
