| 摘要 |
The present invention relates to an appearance inspection apparatus including an inspection unit measuring a thickness of an object to be inspected (K) and a linear transfer unit (10) transferring the object to be inspected (K) and selecting based on a measurement result. The inspection unit comprises: a slit light irradiation unit (23) irradiating slit light; an area sensor camera (22) capturing an image of the slit light; a first and a second optical device (30, 35) receiving the reflected light of the slit light irradiated on a transfer surface and the surface of the object to be inspected (K) in the downstream side of the transfer direction to be induced to the area sensor camera (22); a third and a fourth optical device (40, 45) receiving the reflected light in the upstream side to be induced to the area sensor camera (22); and an inspection unit measuring the thickness of the object to be inspected (K) based on the image captured by the area sensor camera (22) and determining whether the thickness is within a proper range. |
