发明名称 |
MONOCRYSTAL SUBLIMATION APPARATUS USING RESISTANCE HEATING MEANS AND METHOD THEREOF |
摘要 |
The present invention relates to an apparatus and a method for sublimating single crystal using a resistance heating means and, more specifically, to an apparatus and a method for sublimating single crystal using a resistance heating means, wherein the apparatus is capable of producing high-quality crystals by minimizing crystal defects as the conditions for the temperature gradient (ΔT) of a raw powder section and a crystal growth section inside a crucible can be determined freely and is easy for power consumption reduction and enlargement. |
申请公布号 |
KR20150054486(A) |
申请公布日期 |
2015.05.20 |
申请号 |
KR20130136967 |
申请日期 |
2013.11.12 |
申请人 |
THERMVAC ENGINEERING INC. |
发明人 |
CHOI, IN SEOK;KIM, HYOUNG GYU;SHIN, SEOK WOO |
分类号 |
C30B25/10;C30B25/16;C30B29/36 |
主分类号 |
C30B25/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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