| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnesium aluminate-based sintered body excellent in corrosion resistance against halogen-based corrosive gas and plasma thereof.SOLUTION: By including magnesium aluminate as a main crystal phase and including a crystal of MgNiO, a magnesium aluminate-based sintered body excellent in corrosion resistance against halogen-based corrosive gas and plasma thereof can be obtained, and therefor can be used for a long period under a halogen-based corrosive gas atmosphere. |
