FUENTE DE EVAPORACION PARA EL TRANSPORTE DE PRECURSORES QUIMICOS, Y METODO DE EVAPORACION PARA EL TRANSPORTE DE LOS MISMOS QUE UTILIZA DICHA FUENTE.

摘要

The invention presents an evaporation source for transporting chemical precursors to a substrate on which the latter are deposited by means of condensation, formed by a principal tube (1) which houses the precursors in its lower part, and which has heating means (8). An inlet (5) and an outlet (6) for carrier gases is arranged in the upper part of the principal tube (1), said inlet (5) and outlet (6) being located on the lateral surface (7) of the principal tube (1), opposing each other and aligned along a common line which passes transversally through the lateral surface (7) of the principal tube (1). The invention also presents a method of evaporation for transporting chemical precursors in which introducing and extracting the carrier gases from the principal tube (1) is carried out in alignment in a direction transversal to the lateral surface (7) of the latter.