Method of fabricating a polymer waveguide

摘要

A method of fabricating a waveguide device is disclosed. The method includes providing a substrate having an elector-interconnection region and a waveguide region and forming a patterned dielectric layer and a patterned redistribution layer (RDL) over the substrate in the electro-interconnection region. The method also includes bonding the patterned RDL to a vertical-cavity surface-emitting laser (VCSEL) through a bonding stack. A reflecting-mirror trench is formed in the substrate in the waveguide region, and a reflecting layer is formed over a reflecting-mirror region inside the waveguide region. The method further includes forming and patterning a bottom cladding layer in a wave-tunnel region inside the waveguide region and forming and patterning a core layer and a top cladding layer in the waveguide region.

主权项

1. A method of fabricating a polymer waveguide device, the method comprising:
providing a substrate having an electro-interconnection region and a waveguide region; forming a patterned dielectric layer, a patterned redistribution layer (RDL), and a patterned passivation layer over the substrate in the electro-interconnection region; bonding the patterned RDL to a vertical-cavity surface-emitting laser (VCSEL) through a bonding stack; forming a reflecting-mirror trench in the substrate in the waveguide region, wherein the waveguide region has a reflecting-mirror region and a wave-tunnel region; forming a reflecting layer over the patterned passivation layer, the patterned RDL, the reflecting-mirror region, and the wave-tunnel region; forming a patterned bottom cladding layer over the reflecting layer in the wave-tunnel region; and forming a patterned core layer and a patterned top cladding layer over the reflecting layer in the reflecting-mirror region and over the bottom cladding layer in the wave-tunnel region.