Hybrid plasma reactor

摘要

A hybrid plasma reactor includes a reactor body having a plasma discharge space, a gas inlet, and a gas outlet; a hybrid plasma source including an inductive antenna inductively coupled to plasma formed in the plasma discharge space and a primary winding coil transformer coupled to the plasma and wound in a magnetic core; and an alternating switching power supply for supplying plasma generation power to the inductive antenna and the primary winding coil. The hybrid plasma reactor induces a plasma discharge using the inductively coupled plasma source and the transformer coupled plasma source, so that it has a wide operational area from a low pressure area to a high pressure area.

主权项

1. A hybrid plasma reactor comprising: a reactor body having a plasma discharge space, a gas inlet, and a gas outlet; a hybrid plasma source including an inductive antenna inductively coupled to plasma formed in the plasma discharge space and a primary winding coil transformer coupled to the plasma and wounded in a magnetic core; wherein the reactor body comprises a dielectric window formed between the inductive antenna and the plasma discharge space and a discontinuous conductive tube ground connected to an area including the inductive antenna and an alternating switching power supply for supplying plasma generation power to the inductive antenna and the primary winding coil.