Microelectromechanical load sensor and methods of manufacturing the same

摘要

A microelectromechanical (“MEMS”) load sensor device for measuring a force applied by a human user is described herein. In one aspect, the load sensor device has a contact surface in communication with a touch surface which communicates forces originating on the touch surface to a deformable membrane, on which load sensor elements are arranged, such that the load sensor device produces a signal proportional to forces imparted by a human user along the touch surface. In another aspect, the load sensor device has an overload protection ring to protect the load sensor device from excessive forces. In another aspect, the load sensor device has embedded logic circuitry to allow a microcontroller to individually address load sensor devices organized into an array. In another aspect, the load sensor device has electrical and mechanical connectors such as solder bumps designed to minimize cost of final component manufacturing.

主权项

1. A microelectromechanical (MEMS) load sensor device, comprising:
a substrate defining a deformable membrane, a mesa and an overload protection portion, the mesa being configured to receive and transfer an applied force to the deformable membrane, the deformable membrane being configured to deform in response to the applied force; and at least one load sensor element formed on the deformable membrane, the load sensor element being configured to change at least one electrical characteristic based on an amount or magnitude of the applied force, wherein a height of the mesa is greater than a height of the overload protection portion.