Apparatus and method for coating glass substrate

摘要

An apparatus and method for coating a substrate using one or more liquid raw materials, includes: at least one atomizer for atomizing the one or more liquid raw materials into droplets, charging means for electrically charging the droplets during or after the atomization and a deposition chamber in which the droplets are deposited on the substrate, the deposition chamber being provided with one or more electric fields for guiding the electrically charged droplets on the substrate. According to the invention there is a charging chamber arranged upstream of the deposition chamber and provided with charging means for electrically charging the droplets.

主权项

1. An apparatus for coating a glass substrate using one or more liquid raw materials, the apparatus comprising:
at least one atomizer for atomizing the one or more liquid raw materials into droplets; charging means for electrically charging the droplets during or after the atomization; a deposition chamber providing a coating on the glass substrate; a separate charging chamber that is arranged upstream of the deposition chamber, wherein
the charging chamber is provided with one or more atomizers for forming the droplets into the separate charging chamber by atomizing the one or more liquid raw materials into the separate charging chamber with the one or more atomizers,the charging chamber is provided with the charging means for charging the droplets,the distribution of the charged droplets is homogenized in the charging chamber before conducting the charged droplets to the deposition chamber, andthe homogenized distribution of electrically charged droplets is provided to the deposition chamber from the charging chamber; and one or more electric fields provided between first and second electrodes,
wherein the one or more electric fields guides the electrically charged droplets towards the glass substrate, andthe one or more electric fields provided between first and second electrodes is arranged in the deposition chamber.