Four-axis four-subdividing interferometer

摘要

Four-axis four-subdividing interferometer comprising a four-axis light splitting module and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser. The four-axis light splitting system comprises three 50% plane beam splitters and three 45-degree plane reflecting mirrors. The invention comprises a four-axis four-subdividing plane mirror interferometer and a four-axis four-subdividing differential interferometer. In the differential interferometer, an adjustable 45-degree reflecting mirror is used to guide the reference light to a reference reflecting mirror which is arranged in the same direction as a measurement mirror and fixed on the moving object.

主权项

1. A four-axis four-subdividing interferometer comprising
a four-axis light splitting module, and an interference module, wherein the four-axis light splitting module and the interference module are sequentially arranged along an incident direction of a polarization orthogonal double-frequency laser; the four-axis light splitting module comprises a first, a second, and a third splitters, said splitters being plane beam splitters having a 50% splitting ratio and 45-degree angle, and a first, a second, and a third mirrors, said mirrors being full-reflecting mirrors having 45-degree angle; the first splitter divides the polarization orthogonal double-frequency laser into a transmission beam and a corresponding reflection beam; the first mirror reflects and changes a direction of the corresponding reflection beam to be in parallel to the transmission beam; the second splitter and the third splitter are sequentially arranged from bottom to top in a first vertical plane to respectively divide the transmission beam and the corresponding reflection beam with changed direction into subsequent transmission beams and subsequent corresponding reflection beams; the second mirror and the third mirror are sequentially arranged from bottom to top in a second vertical plane to respectively reflect and change direction of the subsequent corresponding reflection beams to be in parallel to the subsequent transmission beams; and the second vertical plane is parallel to the first vertical plane.