TFT array substrate and fabrication method thereof

摘要

A TFT array substrate is provided. The TFT array substrate includes a gate electrode connected to a gate line; a source electrode connected to a data line, the data line crossing the gate line to define a pixel region; a drain electrode facing the source electrode with a channel interposed therebetween; a semiconductor layer forming the channel between the source electrode and the drain electrode; a channel passivation layer formed on the channel to protect the semiconductor layer; a pixel electrode disposed in the pixel region to contact with the drain electrode; a storage capacitor including the pixel electrode extending over the gate line to form a storage area on a gate insulating layer on which a semiconductor layer pattern and a metal layer pattern are stacked; a gate pad extending from the gate line; and a data pad connected to the data line.

主权项

1. A TFT (thin film transistor) array substrate comprising:
a gate electrode connected to a gate line on a substrate; a source electrode connected to a data line, the data line crossing the gate line to define a pixel region; a drain electrode facing the source electrode with a channel interposed therebetween; a semiconductor layer including an ohmic contact layer and an active layer forming the channel between the source electrode and the drain electrode; a channel passivation layer formed on the channel; a pixel electrode in the pixel region to contact directly with an entire upper surface of the drain electrode; a storage capacitor including the pixel electrode extending over the gate line to form a storage area on a gate insulating layer on which a semiconductor layer pattern and a metal layer pattern are stacked; a slit formed around the storage capacitor to expose a top surface of the gate insulating layer; a gate pad connected to the gate line; a data pad connected to the data line; and a transparent conductive pattern formed directly on an entire upper surface of the source electrode, wherein the transparent conductive pattern is formed of the same material as the pixel electrode, wherein the transparent conductive pattern forms a jumping electrode connecting the data line with a lower electrode of the data pad through a contact hole, wherein the channel passivation layer is a surface of the active layer oxidized or nitrided, and wherein the pixel electrode is disposed in the pixel region to contact directly with the substrate.