Silicon acousto-optic modulator structure and method

摘要

An electro-optic structure, which may comprise an acousto-optic modulator for use in an opto-acoustic oscillator, comprises a plurality of rigidly connected resonator core components located movably separated over a substrate and anchored to the substrate at an anchor point. An actuator electrode is located separated from a first one of the rigidly connected resonator core components and an optical waveguide is located separated from a second one of the rigidly connected resonator core components. Radio frequency and direct current actuation of the actuator electrode provides a mechanical vibration in the first rigidly connected resonator core component that is mechanically coupled to the second rigidly connected resonator core component which serves to optically modulate light transported through the wave guide. Reverse operation is also contemplated. Embodiments also contemplate a third rigidly connected resonator core component as a radiation pressure driven detector. Further contemplated are related fabrication and operation methods.

主权项

1. An electro-optic structure comprising:
at least one substrate; a plurality of rigidly connected resonator core components that are rigidly mechanically connected and fixed with respect to each other, and also located movably suspended at least in part over the at least one substrate and anchored to the at least one substrate at an anchor point; at least one actuator electrode located over the substrate and operatively spaced from a first one of the plurality of rigidly connected resonator core components; and a waveguide located over the at least one substrate and operatively spaced from a second one of the plurality of rigidly connected resonator core components.