| 发明名称 | Control module for an ion implanter | ||
| 摘要 | A control module for an ion implanter having a power supply, the power supply comprising: an electricity generator HT having its positive pole connected to ground; a first switch SW1 having its first pole connected to the negative pole of the generator HT and having its second pole connected to the outlet terminal S of the power supply; and a second switch SW2 having its first pole connected to the outlet terminal S and having its second pole connected to a neutralization terminal N. The control module also comprises a current measurement circuit AMP for measuring the current that flows between the second pole of the second switch SW2 and the neutralization terminal N. | ||
| 申请公布号 | US9035269(B2) | 申请公布日期 | 2015.05.19 |
| 申请号 | US201214349499 | 申请日期 | 2012.10.03 |
| 申请人 | ION BEAM SERVICES | 发明人 | Torregrosa Frank;Roux Laurent |
| 分类号 | H01J37/24;H01J37/32;G01R19/00 | 主分类号 | H01J37/24 |
| 代理机构 | Sughrue Mion, PLLC | 代理人 | Sughrue Mion, PLLC |
| 主权项 | 1. A control module for an ion implanter having a power supply, the power supply comprising: an electricity generator (HT) having its positive pole connected to ground; a first switch (SW1) having its first pole connected to the negative pole of said generator (HT) and having its second pole connected to the outlet terminal (S) of the power supply; and a second switch (SW2) having its first pole connected to said outlet terminal (S) and having its second pole connected to a neutralization terminal (N); the control module being characterized in that it includes a current measurement circuit (AMP) for measuring the displacement current that flows between the second pole of said second switch (SW2) and said neutralization terminal (N). | ||
| 地址 | Peynier FR | ||