Deposition method using an aerosol gas deposition for depositing particles on a substrate

摘要

A deposition method includes placing fine particles in an airtight container, the fine particles being obtained by forming a coating layer on a surface of a matrix, the coating layer being more liable to be charged than the matrix with respect to a material of a conveying path, generating an aerosol of the fine particles by introducing a career gas into the airtight container, transporting the aerosol via a transfer tubing to a deposition chamber which is maintained at a pressure lower than that in the airtight container while charging the fine particles by friction with the inner surface of the transfer tubing, the transfer tubing being connected to the airtight container and having a nozzle at the tip, and depositing the charged fine particles on a substrate placed in the deposition chamber by spraying the aerosol from the nozzle.

主权项

1. A deposition method, comprising:
placing particles in an airtight container, wherein the particles include a matrix and a coating layer formed on a surface of the matrix, and wherein the coating layer is configured to be more likely to be charged than the matrix when contacting a material of a conveying path; generating an aerosol of the particles by introducing a carrier gas into the airtight container; transporting the aerosol via a transfer tubing to a deposition chamber which is maintained at a pressure lower than that in the airtight container while charging the particles by friction with the inner surface of the transfer tubing, the transfer tubing being connected to the airtight container and having a nozzle at a tip of the transfer tubing; and depositing the charged particles on a substrate placed in the deposition chamber by spraying the aerosol from the nozzle; wherein the conveying path includes an inner surface of the nozzle and an inner wall surface of the transfer tubing; and wherein the nozzle is disposed in the deposition chamber.