Method of fabricating organic electroluminescent display device

摘要

A method for fabricating an organic electroluminescent display device usable for large-area applications includes: preparing a first substrate; preparing a transfer plate having at least one transfer pattern; forming a first electrode on the first substrate; forming organic light emitting patterns on the at least one transfer pattern on the transfer plate within a region; and bonding the first substrate to the transfer plate, and after the bonding, transferring the organic light emitting patterns from the transfer plate onto the first substrate using a pressure difference between an area within the region and an area outside of the region.

主权项

1. A method of fabricating an organic electroluminescent display device, comprising:
preparing a first substrate; preparing a transfer plate having at least one transfer pattern; forming a first electrode on the first substrate; forming organic light emitting patterns on the at least one transfer pattern on the transfer plate within a region; loading the first substrate and the transfer plate into a vacuum chamber; drawing a vacuum inside of the vacuum chamber; aligning the first substrate and the transfer plate; forming a sealing material contacting the transfer plate and the first substrate; bonding the first substrate to the transfer plate in a vacuum state to contact the organic light emitting patterns on the transfer pattern of the transfer plate to the first substrate, the bonded first substrate and the transfer plate being sealed from the inside space of the vacuum chamber; transferring the organic light emitting patterns on the transfer pattern of the transfer plate onto the first substrate by applying a force caused by the pressure difference between the pressure at the outside of the first substrate and the transfer plate and the pressure at the inside of the first substrate and the transfer plate to the outside surfaces of the contacted first substrate and transfer plate by venting the inside of the vacuum chamber the same pressure being applied to the sealed transfer plate and first substrate when the vacuum chamber is venting; lowering the pressure inside of the vacuum chamber to differentiate between the inside of the contacted first substrate and transfer plate and the outside of the contacted first substrate and transfer plate; and separating the transfer plate from the first substrate.