| 摘要 |
<p>PROBLEM TO BE SOLVED: To enhance the Q value of a piezoelectric thin film resonator, while suppressing spurious.SOLUTION: A piezoelectric thin film resonator includes a substrate 10, a piezoelectric film 14 provided on the substrate, a lower electrode 12 and an upper electrode 16 facing each other while sandwiching the piezoelectric film at least partially, and an insertion film 28 inserted into the piezoelectric film, and provided in the outer peripheral region 52 within a resonance region 50 where the lower electrode and upper electrode face each other while sandwiching the piezoelectric film, but not provided in the central region 54 of the resonance region, and a notch 58 is formed in the resonance region.</p> |
