| 摘要 |
PROBLEM TO BE SOLVED: To enhance the tolerance to RF noise.SOLUTION: A mounting table includes a base, an electrostatic chuck arranged above the base, and having a mounting surface on which a workpiece is mounted, a plurality of heating members arranged on the side opposite from the mounting surface of the electrostatic chuck, a power supply generating a current for heating the plurality of heating members, respectively, wires provided to extend from respective heating members in a direction crossing the mounting surface, and conducting the current between the plurality of heating members and the power supply, and a filter disposed in the wires and removing the high frequency components having a frequency higher than that of the current. |
