| 发明名称 |
CARBON NANO-TUBE PRODUCTION METHOD AND WIRING FORMATION METHOD |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a carbon nano-tube production method which can achieve wiring with low resistance in depth direction.SOLUTION: Upon starting production of carbon nano-tube 57, only acetylene gas is supplied as carbon-containing gas and thereafter, only ethylene gas is supplied as carbon-containing gas. |
| 申请公布号 |
JP2015093812(A) |
申请公布日期 |
2015.05.18 |
| 申请号 |
JP20130234743 |
申请日期 |
2013.11.13 |
| 申请人 |
TOKYO ELECTRON LTD |
发明人 |
NISHIDE DAISUKE;MATSUMOTO TAKASHI;KAGAYA MUNEHITO |
| 分类号 |
C01B31/02;H01B13/00;H01L21/285;H01L21/768;H01L23/522 |
主分类号 |
C01B31/02 |
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