发明名称 SEMICONDUCTOR MODULE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor module having a wiring connection part which achieves high joint strength and long life, and to provide a manufacturing method of the semiconductor module.SOLUTION: A semiconductor module of the invention includes: semiconductor elements 1, each of which has a first main surface and a second main surface facing the first main surface and includes a surface electrode located on the first main surface and a rear surface electrode located on the second main surface; a metal plate 4 which is electrically connected with the rear surface electrode of the semiconductor element 1 through a sintered joint material 2 using metal nanoparticles; and a plate-like conductor 5 which is electrically connected with the surface electrode of the semiconductor element 1 through the sintered joint material 2 using the metal nanoparticles. Grooves 6, which communicate joint regions joined to the semiconductor elements 1 to the exterior of the joint regions, are provided at the metal plate 4 and the conductor 5.
申请公布号 JP2015095545(A) 申请公布日期 2015.05.18
申请号 JP20130233902 申请日期 2013.11.12
申请人 MITSUBISHI ELECTRIC CORP 发明人 HINO YASUNARI
分类号 H01L21/60 主分类号 H01L21/60
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