| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable the detoxification treatment of various kinds of harmful substances and harmful gas, and reliably discharge treatment gas outside without it remaining in a harmful substance removal device by switching the direction of the intake and exhaust of gas flowing in processing equipment.SOLUTION: A harmful substance removal device 3 for removing a harmful substance from harmful substance-containing gas is connected to an intake/exhaust direction switching device 2 for switching a gas intake/exhaust direction. The intake/exhaust direction switching device 2 includes an intake chamber 4 for taking in harmful substance-containing gas, and a first intake/exhaust chamber 5 and a second intake/exhaust chamber 6 for taking in and exhausting gas, connected to the intake chamber 4 and the harmful substance removal device 3. The first intake/exhaust chamber 5 and the second intake/exhaust chamber 6 are connected to the intake chamber 4 by intake pipes 8 and 11 provided with an on-off valve 7, the first intake/exhaust chamber 5 is connected to an upper intake/exhaust port 37 by an intake/exhaust pipe 18, the second intake/exhaust chamber 6 is connected to a lower intake/exhaust port 38 by an intake/exhaust pipe 19, and exhaust pipes 14 and 15 provided with the on-off vale 7 for exhausting the gas after treatment are connected to the intake/exhaust pipes 18 and 19.</p> |
