发明名称 ORIGINAL PLATE HOLDING DEVICE, EXPOSURE DEVICE, METHOD OF MANUFACTURING ARTICLE, AND ORIGINAL PLATE HOLDING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a technique advantageous for reducing probability of damaging an original plate when holding the same.SOLUTION: An original plate holding device for holding an original plate includes a first holding section for holding the original plate, a second holding section movable for the first holding section and holding the original plate, a fixing section for fixing the second holding section for the first holding section, and an adjustment section for adjusting the original plate holding force so as to increase the original plate holding force of the second holding section, after fixing the second holding section by the fixing section in a state where the original plate holding force of the second holding section is smaller than the original plate holding force of the first holding section.
申请公布号 JP2015095494(A) 申请公布日期 2015.05.18
申请号 JP20130232581 申请日期 2013.11.08
申请人 CANON INC 发明人 MATSUMURA YUHEI
分类号 H01L21/027 主分类号 H01L21/027
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