MANUFACTURING METHOD OF OSCILLATOR, MANUFACTURING METHOD OF SEMICONDUCTOR CIRCUIT DEVICE AND SEMICONDUCTOR CIRCUIT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an oscillator which allows a period of time and man-hours required for inspection to be reduced and equipment investment to be suppressed, and further to provide a manufacturing method of a semiconductor circuit device and the semiconductor circuit device.SOLUTION: An oscillator 1000 comprises: a vibrator 100; and a semiconductor circuit device 1 having an oscillation section 10 connected to the vibrator 100 and a control section 20 for controlling operation modes including a normal mode where the oscillation section 10 performs oscillation operation and an inspection mode where characteristics of the vibrator 100 are inspected as the operation modes. A manufacturing method of the oscillator 1000 includes: a step (step S200) of preparing the semiconductor circuit device 1 with the operation mode set to the inspection mode; a connection step (step S202) of electrically connecting the vibrator 100 and the semiconductor circuit device 1; and an inspection step (step S204) of inspecting the characteristics of the vibrator 100 in a state of being electrically connected to the semiconductor circuit device 1.