| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a fluid switching device capable of switching a fluid into another fluid quickly without fluctuating a flow rate.SOLUTION: A fluid switching device includes: a switching mechanism that switches between a mode in which a first flow passage 11 into which a first fluid whose flow rate is controlled is introduced communicates with a first lead-out flow passage 21 and a second flow passage 12 into which a second fluid whose flow rate is controlled is introduced communicates with a second lead-out flow passage 22, and a mode in which the second flow passage 12 communicates with the first lead-out flow passage 21 and the first flow passage 11 communicates with the second lead-out flow passage 22; and a pressure control mechanism 5 that performs control so that the pressure of the second lead-out flow passage 22 is close to the pressure of the first lead-out flow passage 21.</p> |
