| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress the release of dust and the like to the outside of a processing chamber.SOLUTION: A processing chamber is intended to remove the dust and the like containing mist generated during processing time, using dust collecting means. A door opening/closing control method of the processing chamber measures the pressure inside the processing chamber and the pressure outside the processing chamber. When the pressure of the inside is lower than the pressure of the outside, the opening of the door of the processing chamber is allowed. On the other hand, when the pressure of the inside is not lower than the pressure of the outside, the opening of the door of the processing chamber is inhibited. Thus, the release of dust and the like to outside the processing chamber can be suppressed.</p> |
