发明名称 METHOD OF PRODUCING TITANIUM OXIDE FILM, AND TITANIUM OXIDE FILM
摘要 <p>PROBLEM TO BE SOLVED: To provide a method of producing a titanium oxide film having a crystal particle size controlled in a wet method, and such a titanium oxide film.SOLUTION: By holding a liquid composed of a titanium oxide cluster compound and an organic solvent at 250-400°C for heat treatment, a titanium oxide film having fine irregularities can be obtained.</p>
申请公布号 JP2015093821(A) 申请公布日期 2015.05.18
申请号 JP20130235634 申请日期 2013.11.14
申请人 TOSOH CORP 发明人 HARA YASUSHI;KINOSHITA TOMOYUKI
分类号 C01G23/04 主分类号 C01G23/04
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