POLYMER MICRO PROBE AND MANUFACTURING METHOD OF THE SAME

摘要

The present invention relates to a polymer micro-probe and a manufacturing method for the same. The polymer micro-probe according to the invention includes: a polymer-based body unit (110) including multiple metal pads (111) and combined with an integrated cantilever (112) protruding on one side; and a probe unit (120) with multiple probes (121) which are connected in electrode patterns corresponding to the metal pads (111) and whose ends are protruded outside of the cantilever (112) along the cantilever (112) so that they can be in full contact with the specimen and be driven independently.