表面形状测量装置;SURFACE PROFILE MEASUREMENT APPARATUS

摘要

一种表面形状测量装置，包括：转换光学系统，使用分别由3个以上的光程构成的多个转换光程将雷射光的照射位置的图像在所述区域的长边方向上分割为多个图像；及摄影部，具有成像透镜，总括拍摄所述图像；且所述多个反射镜以如下方式配置，即转换光程中所包含的多个反射镜分别以与成像透镜的数值孔径、及自雷射光的照射位置至该反射镜为止的光程长对应的长度，在与图像的长边方向对应的方向上延伸设置，并且构成与该转换光程不同的另一转换光程的反射镜不位于各转换光程的光程上。; and an imaging part having an imaging lens and collectively photographing the pictures. The mirrors are arranged as the following: the mirrors included in the conversion optical paths extend respectively in a direction corresponding to the length direction of the picture with a numerical aperture of the imaging lens and a length corresponding to an optical path length from the irradiation position of the laser beam to the mirror, and a mirror constituting a different conversion optical path is not located on the optical path of each of the conversion optical paths.