摘要 |
所提供之化学机械研磨垫堆叠体系含有:研磨层;刚性层;以及,将该研磨层结合至该刚性层之热熔性黏着剂;其中,该研磨层系包含下列成分之反应产物,该成分包括:多官能异氰酸酯;以及,固化剂包;其中,该固化剂包系含有胺起始之多元醇固化剂及高分子量多元醇固化剂;其中,该研磨层系显现大于0.6g/cm 3 之密度;5至40之肖氏D(Shore D)硬度;100至450%之断裂伸长率;以及,25至150μm/hr之切割速率;以及,其中,该研磨层系具有适用于研磨基板之研磨表面。; a rigid layer; and, a hot melt adhesive bonding the polishing layer to the rigid layer; wherein the polishing layer comprises the reaction product of ingredients, including: a polyfunctional isocyanate; and, a curative package; wherein the curative package contains an amine initiated polyol curative and a high molecular weight polyol curative; wherein the polishing layer exhibits a density of greater than 0.6 g/cm 3 ; a Shore D hardness of 5 to 40; an elongation to break of 100 to 450%; and, a cut rate of 25 to 150 μm/hr; and, wherein the polishing layer has a polishing surface adapted for polishing the substrate. |
申请人 |
罗门哈斯电子材料CMP控股公司 ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC. |
发明人 |
磨内 詹姆士 MURNANE, JAMES;钱 百年 QIAN, BAINIAN;挪兰 约翰G NOWLAND, JOHN G.;杰森 米雪尔K JENSEN, MICHELLE K.;汉卓恩 杰弗瑞 詹姆士 HENDRON, JEFFREY JAMES;狄罗特 马提W DEGROOT, MARTY W.;詹姆斯 大卫B JAMES, DAVID B.;叶 逢蓟 YEH, FENGJI |