形状测定装置及形状测定方法;SHAPE MEASURING APPARATUS AND SHAPE MEASURING METHOD

摘要

本发明系提供一种能够以简易的构成来抑制振动的影响之形状测定装置及形状测定方法。;本发明之形状测定装置1系具备：具有与样本S的表面SS相对之参照平面41之半透明光学构件4；通过光学构件4将具有指定的波长区域的光照射在样本S的表面SS之光源2；针对样本S的表面SS上被定义的线状区域之各位置测定反射光谱之影像分光器6；及基于在线状区域的各位置所测定到的反射光谱，来计算出线状区域的各位置与参照平面41间之距离的演算部7。;The shape measuring apparatus 1 according the present invention comprises: a semi-transparent optical component 4 having a reference surface 41 opposite to a surface SS of a sample S; a light source 2 illuminating a light of an assigned wavelength region on the surface SS of the sample S through the optical component 4; an image splitter 6 for detecting reflective light spectrums from positions at a defined line-shaped area on the surface SS of the sample S; and a calculator 7 calculating distances between the positions at the line-shaped area and the reference surface 41 based on the reflective light spectrums detected at the positions.